@InProceedings{CorreaUeMaMiBaFe:2009:ImElRe,
author = "Correa, W. L. A. and Ueda, M{\'a}rio and Matsushima, J. T. and
Miranda, C. R. B. and Baldan, Maur{\'{\i}}cio Ribeiro and
Ferreira, Neidenei Gomes",
affiliation = "{Universidade S{\~a}o Francisco} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais
(INPE)} and {Instituto Nacional de Pesquisas Espaciais (INPE)} and
{Instituto Nacional de Pesquisas Espaciais (INPE)}",
title = "Improvement of Electrochemical Response of Diamond Film with
Sulfur Addition by Nitrogen Plasma Immersion Ion Implantation",
year = "2009",
organization = "International Workshop on Plasma-Based Ion Implantation and
Deposition, 10. (PPI\&D).",
abstract = "The purpose of this work was to investigate the effects of
nitrogen plasma immersion ion implantation on diamond film with
sulfur addition. The diamond film was grown on Si substrate by hot
filament chemical vapor deposition (HFCVD). It was examined how
added sulfur influences the diamond growth rate, morphology,
growth orientation and the crystal quality as well as the
improvement of electrochemical response by nitrogen plasma ion
implantation. The morphology and structure of the film were
studied by scanning electron microscopy (SEM) and visible Raman
spectroscopy techniques, respectively. Plasma immersion ion
implantation technique showed good nitrogen implanted profile. For
nitrogen implantation, a DC glow discharge plasma of 1x1010 cm-3
density were produced in a 1 mTorr nitrogen gas pressures and a
high voltage pulses of 12 kV amplitude, 50 {\`{\i}}s duration
and 300 Hz repetition frequency. The characterization of the
working potential window and capacitive currents were obtained by
cyclic voltammetry measurements. The results showed that
electrochemical response of the diamond films were improved by
nitrogen plasma ion implantation, however the film morphology is
crucial to analyze the results from cyclic voltammograms.",
conference-location = "S{\~a}o Jos{\'e} dos Campos, SP",
conference-year = "7-11 Sept.",
urlaccessdate = "13 maio 2024"
}